A New Dimension in Variable Pressure SEM

The SU3500 from Hitachi High-Technologies is a new type of premium VP-SEM, featuring a newly designed Ultra Variable Pressure Detector. Meticulous attention to detail has been applied to all aspects of the instrument design – including the electron optics, detection system, vacuum system, chamber/stage and the user interface.

A newly developed low-aberration objective lens coupled with the latest detection technology gives incredible imaging performance, especially at low voltages. The new electron gun and advanced image processing system provide the highest signal-to-noise ratio for exceptional imaging clarity, whilst also making navigation and image adjustment easier than ever before.

SE and BSE imaging is available in low and high vacuum. The newly developed Ultra Variable Pressure Detector (UVD) provides high efficiency topographical SE imaging throughout the whole voltage and pressure range, from 6-650Pa. The high sensitivity 5-segment BSE detector provides similarly impressive compositional imaging.

A live stereoscopic function provides real-time 3D sample observation, utilizing high-speed automated beam tilt - so you can get a true impression of the sample morphology at any time. There’s even an option for an auto-stereoscopic 3D display which means you don’t need to wear any special glasses during 3D observation.

The newly developed user interface provides a truly intuitive operation experience, whilst making full use of the latest ultra-high resolution monitors. Fast and accurate auto-functions, including a comprehensive auto-start feature, ensure quick and reliable imaging on any sample and by any user.

All this capability is available with a highly flexible stage and chamber configuration, ensuring the instrument can grow with your demands. The SU3500 joins the widely acclaimed S-3400 and S-3700 VP-SEMs, which remain a key part of the comprehensive product range.