Hitachi Announces 3D Analysis Software for VPSEMs

Hitachi High-Technologies has announced the availability of a new 3D analysis software package for use on its S-3400N and S-3700N variable pressure scanning electron microscopes. The new software is used in conjunction with the instruments’ 5-segment solid state backscattered detector and provides the capability to produce, manipulate and record 3D visualizations of a specimen and make comprehensive measurements of the 3D characteristics.

The 5-segment backscattered detector allows independent adjustment of the different segments to allow emphasis on either the topography or composition of the sample. The new software takes this one step further and automatically collects a series of 4 independent images from individual segments of the backscattered electron detector. Height information is calculated from differences in the 4 obliquely detected images.

A comprehensive range of measurements can be made using the new software. These include height measurement, surface area measurement and surface roughness measurement using a section profile, utilising industry-standard methods.

This new software provides an extremely easy to use alternative for acquiring 3D information compared to methods that either involve manual tilting of the specimen or electronic tilting of the incident electron beam. Mouse-controlled zoom and rotation of the 3D image is provided, together with the ability to record animations of image as AVI files so that the information can be easily shared without the need for any special software.