New OEM Optical Metrology Module: Accurate in-situ production metrology

Santa Barbara, CA, September 5, 2001 - Veeco Metrology Group announces the new Wyko Optical Metrology Module (OMM) for in-situ metrology in high-volume production environments for OEM applications. The OMM provides accurate process control metrology where it is needed most - on the production floor - featuring high-speed, non-contact topography measurements for feature heights from 0.1nm up to 2mm and for fields of view up to 8mm square on advanced surfaces. Utilizing the field-proven interferometry techniques that power Wyko Optical Profilers, the OMM is a stand-alone module designed to easily integrate into the user’s production equipment and environment. When integrated with the user’s production equipment, the gauge-capable OMM provides closed-loop feedback, minimizes part handling, and meets critical measurement requirements for a wide range of applications, such as magnetic recording heads, rolled steel, print rollers, fiber optics, optical filters, and more. The OMM supports both phase-shifting and white light interferometry.

The OMM’s straightforward interface of self-contained tip/tilt, illumination, auto-focus, and motorized turret mates easily with new and existing machinery and handling. Ethernet-based architecture allows access from a remote computer, and customizable recipes enable complete control of automated measurement runs. With an easy-to-use production interface and versatile Vision32™ software for analyzing and visualizing data, OMM puts accurate process control metrology where it’s needed the most - on the production floor.

Veeco Instruments, Inc. is a worldwide leader in process equipment and metrology tools for the optical telecommunications, data storage, semiconductor and research markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Arizona and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific. Additional information on Veeco can be found at www.veeco.com.