New Piezomotor Stages and Servo Controllers at Semicon West

12 Jul 2007

Piezo Motion Control specialist PI (Physik Instrumente) L.P. will show a number of new ultrasonic piezomotor-driven translation stages and new servo controllers at SEMICON West in San Francisco, CA, July 17-19, 2007.

Features & Advantages:

  • Fast: Piezo Motor Drives Provide High Speed to 100 mm/sec
    and Response Time in the Millisecond Range
  • Precise: Closed-Loop w/ 0.1 µm Resolution Linear Encoders
  • Large Clear Aperture: 78 x 78 mm
  • Compact Design: 27 mm Profile Height only, 150 x 150 mm Footprint
  • Long Travel: 25 x 25 mm
  • Stable: Self-Locking at Rest
  • Flexible: Combines with Nanopositioning / Scanning Stages

About M-686-XY Piezomotor Stages and Scanners
The low-profile M-686 open-frame XY piezomotor stages are mainly designed for automated-positioning applications in inspection and microscopy. For ultra-high resolution applications they can be combined with nanopositinng scaning stages; the low profile height of the M-686 (only 27 mm) provides for a very compact system.

Space Saving Piezo Motors
Compared to conventional motorized translation stages, the M-686 provides a lower profile and smaller footprint. The compact PILine® piezoelectric linear motors and high resolution linear encoders make both the leadscrew / duct and flanged, bulky stepper motor employed in traditional stages obsolete. In addition, the piezo motors are self-locking at rest and hold the stage in a stable position.

Combines with High-Resolution Scanning Microscopy Piezo Stages
For ultra-high resolution applications, a number of piezo-nanopositioning systems can be mounted in the XY motor stage. They are available as fast, XY scanners (for fluorescence microscopy), as Z-positioners (3D imaging), or with up to 6 Axes.

Closed-Loop Operation: Optimized for High Velocity and Rapid Step/Settling
The M-686 stages can be operated in closed-loop with the new C-866 piezo motor controller / driver. This highly specialized controller achieves very short settling times (millisecond range) and can handle speeds up to 400 mm/s.

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