Ultra-High Performance STEM Announced

Hitachi High-Technologies has announced the launch of the HD-2700 ultra-high resolution scanning transmission electron microscope (STEM). This instrument is characterized by new electron optics which now includes a spherical aberration correction system (developed in collaboration with CEOS GmbH).

By reducing the performance-limiting spherical aberration, the HD-2700 offers significantly improved resolution and analytical sensitivity, enabling atomic level imaging on many specimens. The HD-2700 has applications in materials science, semiconductors and nanotechnology, both in research and development and quality control.

High speed, high sensitivity EDX analysis is possible since the HD-2700 can achieve exceptionally high probe current density (10x greater probe current than other models in the HD-series). This allows extremely rapid acquisition of elemental distribution images, even for elements at low concentration. Electron energy loss spectrometry is also available for analysis with enhanced spatial resolution and even lower elemental detection limits.

Extremely versatile imaging allows simultaneous multiple-image acquisition and display, with a wide variety of combinations, including Secondary Electron/Bright Field, Secondary Electron/Dark Field, Bright Field/Dark Field, Dark Field/EDX and Dark Field/EELS. A comprehensive digital image management system is also included.

The HD-2700 enjoys the same simplicity of operation as other models in the HD-series with a user interface that is as easy to use as that of an SEM enabling occasional users to produce results only dedicated specialists could achieve in alternative instruments. The HD-2700 also has sample holders that are fully compatible with the FB-2100 Focused Ion Beam System, ensuring seamless interchange between the instruments for sample preparation and imaging and analysis. This also provides high sample-throughput so that the HD series can meet varied demands from state-of-the-art R&D to evaluation at the production line.