VEECO METROLOGY GROUP INTRODUCES THE NEW WYKO NT1100 OPTICAL PROFILER

Tucson, AZ, April 28, 2002 Veeco Metrology Group, a world leader in 3D surface metrology, recently introduced the Wyko NT1100 Optical Profiler. The NT1100 provides accurate, cost-effective surface measurement with Angstrom resolution, as well as stitching automation for large area measurements.

With applications in R&D, quality inspection, failure analysis and process control, the Wyko NT1100 is ideal for MEMS, thick films, ceramics and interconnects, as well as advanced materials, precision surfaces, and optic.

“The NT1100 is a major advance in delivering performance, price and productivity for surface metrology,” said Lloyd LaComb, Senior Vice President and General Manager of Veeco Metrology Group, Tucson. “This system offers speed, repeatability and accuracy at all magnifications, without compromising vertical resolution. With these strengths, the NT1100 greatly outperforms competing technologies such as white light confocal and laser stylus microscopy.”

The NT1100 employs non-contact interferometry for highly accurate and repeatable 3D surface measurements from 0.1 nm to two millimeters. A member of the industry-standard Wyko NT Series, the NT1100 features excellent ergonomics and a small footprint design for laboratory integration. The Data Stitching option adds a motorized X/Y stage and software for rapid measurement of large surface areas. Windows®-based Wyko Vision32® analysis software, included with the NT1100, provides extensive data analysis, interactive 2D and 3D displays, advanced data filtering and a statistical database for production measurement.

Veeco Instruments Inc. is a worldwide leader in process equipment and metrology tools for the optical telecommunications/wireless, data storage, semiconductor and research markets. Manufacturing and engineering facilities are located in New York, California, Colorado, Arizona and Minnesota. Global sales and service offices are located throughout the United States, Europe, Japan and Asia Pacific. Additional information on Veeco can be found at http://www.veeco.com