XYZ Piezo Positioning & Scanning Stage for Surface Profiling, Nano Metrology, Scanning Microscopy...

PI (Physik Instrumente) L.P. — a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for semiconductor, nanotechnology & photonics applications — offers the new P-733.3CD, XYZ nanopositioning & scanning system.

These high-resolution piezo stages are designed for materials research, high resolution microscopy, ultra precision alignment and imaging applications. The parallel-kinematics design (only one common moving platform for XYZ) reduces the moved mass, and enables -- together with the stiff design --higher operating speeds than other piezo scanning stages. A parallel metrology position sensor design provides highly accurate position information in all axes.