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JEM-ACE200F
High-throughput Analytical S/TEM
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An automated, high-throughput S/TEM designed to meet the unique demands of semiconductor device development and manufacturing. The JEM-ACE200F delivers fast, stable, and highly-resolved data acquisition for morphological observation, critical dimension measurements and elemental analysis. The JEM-ACE200F can utilize pre-programmed recipes for wholly unattended operation. Based on the industry-standard ARM200F and F2 JEOL instruments, the ACE provides superb stability and repeatability.
