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SU-8 3000

MicroChemAvailable: Worldwide

SU-8 3000 is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick, chemically and thermally stable image is desired.

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Average Rating 4.7

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Average Rating 4.7

Application Area:

Microfabrication

The product is the highest quality in the market, and the company has very good after-sales services as well.

Review Date: 26 Mar 2019 | MicroChem

SU-8 3000 is a high contrast, epoxy based photoresist designed for micromachining and other microelectronic applications, where a thick, chemically and thermally stable image is desired.

SU-8 3000 is an improved formulation of SU-8 and SU-8 2000, which has been widely used by MEMS producers for many years. SU-8 3000 has been formulated for improved adhesion and reduced coating stress. The viscosity range of SU-8 3000 allows for film thicknesses of 4 to 120 µm in a single coat.

SU-8 3000 has excellent imaging characteristics and is capable of producing very high, over 5:1 aspect ratio structures. SU-8 3000 has very high optical transmission above 360 nm, which makes it ideally suited for imaging near vertical sidewalls in very thick films. SU-8 3000 is best suited for permanent applications where it is imaged, cured and left on the device.

Features:

  • Improved adhesion
  • Reduced coating stress
  • High aspect ratio imaging
  • Vertical sidewalls
  • Greater than 100 µm film thickness in a single coat
  • Excellent dry etch resistance

Material uses:

  • Waveguides
  • Microfluidics
  • Stamps

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