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Vacuum Pump Isolation Valve (VPI)

Agilent vacuum pump isolation (VPI) valves are inlet protection valves that electrically connect with the mechanical pump. The valves close rapidly when power is interrupted to prevent oil backstreaming or particle migration into the vacuum system. They also vent the pump from the inlet side, pushing any debris towards the outlet, and preventing it from being swept into the system when pumping is restarted.

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Average Rating 3.7

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Average Rating 3.7

Application Area:

Plasma cleaning of PDMS samples

Good system in combination with pump

Review Date: 29 Mar 2022 | Agilent Technologies

Agilent vacuum pump isolation (VPI) valves are inlet protection valves that electrically connect with the mechanical pump. The valves close rapidly when power is interrupted to prevent oil backstreaming or particle migration into the vacuum system. They also vent the pump from the inlet side, pushing any debris towards the outlet, and preventing it from being swept into the system when pumping is restarted.

The body design and right-angle configuration of the valves provide maximum conductance. Reliable seals offer fast-acting, immediate protection of your vacuum system.

Features:

  • Reliable, repeatable seals with lock-over-center mechanism
  • Fast-acting, immediate protection of your vacuum system from oil or contaminant migration in case of power failure, valve closes in less than 30 ms
  • Provides venting of the pump at the pump inlet, flow direction is maintained
  • Oil/debris are not swept into the system
  • Remains closed until pump inlet pressure returns to system pressure for continued protection and easy restart
  • Operates with atmospheric pressure and is activated if electrical power is lost, no compressed air required for operation
  • Provides maximum conductance, no reduction of pumping speed

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