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Analysis of BPSG films
1 Apr 2020In this application note, Malvern Panalytical utilizes the 2830 ZT Wafer Analyzer to determine the boron and phosphorus concentration and film thickness of BPSG films.
In this application note, Malvern Panalytical utilizes the 2830 ZT Wafer Analyzer to determine the boron and phosphorus concentration and film thickness of BPSG films.