Analysis of Isopropyl Alcohol (IPA) using Ultrasonic Nebulization with Membrane Desolvation and Quadrupole ICP-MS Detection

Trace element measurement in organic solvents such as isopropyl alcohol (IPA) is an important application in the semiconductor industry. Inductively coupled plasma mass spectrometry (ICPMS) offers parts per trillion (ppt) and sub-ppt detection limits for many elements, but introduction of volatile organic solvents can present a number of problems: plasma instability and/or failure, carbon buildup on the sampling interface, and solvent-based mass spectral interferences. This application note demonstrates the use of the CETAC U6000AT+ Ultrasonic Nebulizer / Membrane Desolvator in stabilizing the plasma operation through removal of most of the diluting organic solvent during analyte transport.