Characterization of Amorphous and Microcrystalline Silicon Using Raman Spectroscopy

Silicon deposited on glass or silicon carbide is widely used in manufacturing photovoltaic cells. Raman spectroscopy is an ideal technique for this application. By mapping an area of deposited silicon the uniformity of the distribution of the two silicon forms can be monitored. This application note shows typical results and discusses some of the practical aspects and potential pitfalls of using Raman spectroscopy for measuring amorphous and crystalline silicon.