Characterization of Monolayer Segregation Using ZEISS MERLIN

Electron probe micro analysis (EPMA) is a useful alternative to Auger electron spectroscopy for surface analysis as it does not require any in situ preparation and is not strongly sensitive to surface contamination. In this application note, the ZEISS MERLIN FE-SEM is demonstrated as a versatile imaging instrument for detecting trace elements at the parts per million (ppm) level.