Determination of Impurities in Organic Solvents used in the Semiconductor Industry with the NexION

300S ICP-MSThis application note demonstrates the ability of the NexION 300S ICP-MS to remove interferences so that trace levels of impurities in IPA and PGMEA can be easily measured using hot plasma conditions for all analytes in a single analysis. This was best accomplished using both Standard and Reaction modes in a single method.