High-resolution imaging with ZEISS Gemini Optic on real samples

In this application note from ZEISS, the high-resolution imaging capabilities of the ZEISS Gemini Optics on real-world samples are demonstrated. A variety of samples, including mesoporous silica, platinum nanostructures, moth wing, and nanometer-spaced FeO(OH) crystals, were imaged using the Inlens secondary electron (SE) or Inlens Duo detector. In addition, a 45 nm semiconductor device and a fin field-effect transistor (FinFET) were imaged using annular scanning transmission electron microscopy (STEM) and pure backscattered electrons (BSE) imaging, respectively.