Information from Every Angle: Directional BSE Detector for Next-Level Imaging

Due to its ease of use, speed, intuitively interpreted images and analytical results, SEM is one of the most commonly used tools to determine the morphology and physical nature of samples. Correctly and easily discriminating the different signals is crucial in understanding the material properties being analyzed and drawing the correct conclusions. This application note will look at the different signals available, and methodologies to capture all of the available information. The Directional Backscatter Detector, available on all FEI’s SEM and DualBeam systems offers a unique way to simultaneously capture information from every angle, while other benefits such as filtering of charge while imaging non-conductive specimen is also realized.