Investigation of the Formation and Structure of APTES Films on Silicon Substrates

In this study, APTES films are produced in two different solutions, anhydrous toluene and phosphate buffered water, for varied deposition times. The effect of the reaction solution and deposition time on the structure of APTES films is investigated via Fourier transform infrared spectroscopy (FTIR) with a grazing–angle attenuated total reflection method and ellipsometry.