ISO-standardized filtering for DektakXT Stylus Profilers

The measurement of various parameters of interest for a surface, including roughness, step heights or depths, by any metrology method necessarily provides only a representation of the surface details. The power of proper filtering for data analysis, according to recognized ISO standard methods cannot be underestimated when striving to provide the most accurate and reproducible results for a measuring system. Bruker has designed ISO compatibility to the two-dimensional (2D) profile ISO 4287 and 4288 standards into the versatile Vision64^™ software that powers the DektakXT^® StylusProfiler. In this application note, Bruker Nano provides information about the setup and application of these standardized filtering methods as well as the implementation within Vision64 software for a specific applications example of scanning an Si wafer for surface roughness.