Maya2000 Pro Deep UV Measurements to 153 nm

Spectral measurements down to 153 nm can be achieved easily and economically with the high-sensitivity Maya2000 Pro with the Extra-Deep UV option. A variety of materials have spectral signatures in the vacuum ultraviolet (VUV) spectral region (from 10 nm-200 nm); VUV spectroscopy is useful for applications ranging from biologicals to semiconductor metrology and quality control.