Multielement nanoparticle analysis of semiconductor process chemicals using spICP-QQQ

In this application note, Agilent presents a study where multiple element NPs were measured in semiconductor grade tetramethyl ammonium hydroxide (TMAH). The Agilent 8900 Triple Quadrupole ICP-MS (ICP-QQQ) was used for the analysis because of its high sensitivity, low background, and effective interference removal capability.