Principle setup of a ZEISS FIB-SEM

In this application note, ZEISS explains the components and terminologies of their FIB-SEM setup. The setup includes various parts such as the Inlens energy selective backscattered (EsB) detector, scanning electron microscope (SEM) and focused ion beam (FIB) columns, Ga-Reservoir, and Blanker Plates. The goal of the setup is to position the sample surface at the eucentric height of the stage and the coincidence point is defined by the intersection of the SEM and FIB beams.