Rapid sample preparation for EBSD analysis

In this application note, ZEISS discusses the increase in the use of focused ion beam equipped scanning electron microscopes (FIB-SEM) in materials science as they are versatile research instruments for direct microstructure preparation and materials characterization. Also highlighted is the proven benefit of FIB preparation for location-specific cross-sectioning while maintaining a deformation-free microstructure. To overcome issues related to time and cost-intensive methods, ZEISS implemented nanosecond laser ablation systems in its FIB-SEM systems but finds that it alters the microstructure due to heat input. To solve this issue, ZEISS switched to using a femtosecond laser which reduces thermal impact and facilitates fast sample machining, enabling EBSD analysis directly on the laser polished surface.