Thickness Analysis of a Natural Oxide Film on a Microscopic Si Pattern

In this application note, the thickness of the SiO₂ layer on a sample was analyzed from an obtained reference spectra using the MSV-5000 from JASCO. The MSV-5000 series micro-spectrophotometer is ideal for transmission and reflection measurements of samples as small as 10 μm diameter over a wide wavelength range from the ultraviolet to the near-infrared wavelengths.