Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air

Damage to scanner lenses by Trimethylsilanol (TMS) in cleanrooms in the semiconductor industry has resulted in the demand for accurate and reliable methods for measuring TMS at trace levels. This application note describes a whole air canister-based approach for field sampling TMS in air, as well as a preconcentration GC-MS laboratory method for analysis.