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ZSX Primus III+

Rigaku Corporation

Rigaku ZSX Primus III+ delivers rapid quantitative determination of major and minor atomic elements, from oxygen (O) through uranium (U), in a wide variety of sample types — with minimal standards. ZSX Primus III+ features an innovative optics-above configuration. Never again worry about a contaminated beam path or down time due to sample chamber maintenance. The optics-above geometry eliminates cleaning worries and increases…

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nano3DX XRM

Rigaku Corporation

Rigaku nano3DX is a true X-ray microscope (XRM) with the ability to measure relatively large samples at high resolution. This is accomplished by using a high powered rotating anode X-ray source and a high-resolution CCD imager. The rotating anode provides for fast data acquisition and the ability to switch anode materials easily to optimize the data acquisition. AVAILABILITY: Japan, Austraila/NZ and North AmericaThe new nano3…

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WaferX 310

Rigaku Corporation

Rigaku's WaferX 310 represents the culmination of 35 years of experience in the X-ray fluorescence analysis of thin films on silicon wafers. The WaferX 310 is ideal for measuring BPSG, PSG and metal films. In addition, thin film BPSG, multilayered circuit film, WSix, electrode films, ferrodielectric thin films, FRAM, next generation DRAM, and SiOF are standard applications for this tool.Highly accurate analyses for the ultral…

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AZX 400 WDXRF

Rigaku Corporation

Rigaku's unique AZX 400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and/or heavy samples. Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg weight, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.Having the versatility to adapt to your specific…

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