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AccuSizer Mini FX System

EntegrisMINIFXAvailable: Worldwide

The AccuSizer Mini system is engineered using a modular design that allows us to match sensors and fluidics options to customer slurries and process equipment. Our systems generate the highest accuracy and resolution results quickly and at count rates higher than any other technology. This improves statistics to assure detection of large particle counts (LPC) that reduce yields. A variety of custom autodilution modul…

Entegris

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AccuSizer Mini FX System

  • Range: 0.65 - 20 µm, up to 106 particles/mL
  • Single stage dilution fluidics
  • Ideal for ceria CMP slurries

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