Products & ReviewMaterials
AccuSizer Mini LE System
EntegrisMINILE1
The AccuSizer Mini system is engineered using a modular design that allows us to match sensors and fluidics options to customer slurries and process equipment. Our systems generate the highest accuracy and resolution results quickly and at count rates higher than any other technology. This improves statistics to assure detection of large particle counts (LPC) that reduce yields. A variety of custom autodilution modul…
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AccuSizer Mini LE System
- Range: 0.5 - 400 µm, up to 9,000 particles/mL
- Single or dual-stage dilution fluidics
- Ideal for silica CMP slurries
