CryoSAS Silicon Analysis System

CryoSAS is an automated high sensitivity FT-IR system for the quality control of solar and electronic grade Silicon according to international ASTM/SEMI standards.

Although sample cooling to very low temperatures is required, CryoSAS operates without cryogenic liquids, is easy to use and optimized for the requirements of industry customers.

CryoSAS combines Bruker's high performance FT-IR spectrometers with built-in, closed-cycle cryo-cooling technique that does not require any liquid Helium. All CryoSAS components are state-of-the-art, yet utilize proven technologies to accomplish a difficult analysis in the demanding silicon production environment. CryoSAS can be operated at a high level of automation including accurate reporting of the analysis results.


CryoSAS System Features:

• Quantification of group III and V impurities (B, P, As, Al etc.) in single crystal Silicon down to the low ppta range according to ASTM/SEMI MF1630
• Quantification of substitutional Carbon in polysilicon or single crystal Silicon down to the low ppba range according to ASTM/SEMI MF1391
• Quantification of interstitial oxygen in polysilicon or single crystal Silicon down to the low ppba range
• Closed cycle cooling that requires no cryogenic liquids
• Fully automated measurement cycle and data evaluation, including report generation
• Dedicated optical components to analyze all impurities simultaneously within one measurement