ESCALAB™ QXi X-ray Photoelectron Spectroscopy (XPS) Microprobe

Equipped with a micro-focusing X-ray monochromator designed to deliver optimum XPS performance, the ESCALAB QXi X-ray Photoelectron Spectroscopy (XPS) Microprobe ensures maximum sample throughput. The multi-technique capability and availability of a range of preparation chambers and devices provides the solution to any surface analytical problem. Using the advanced Avantage data system for acquisition and data processing, maximum information is extracted from the data.

Features:

• High sensitivity spectroscopy
• Small area XPS
• Depth profiling capability
• Angle resolved XPS
• Ion scattering spectroscopy (ISS) in base system
• Reflected electron energy loss spectroscopy (REELS) in base system
• Optional automated sample exchange
• Optional MAGCIS monatomic & gas cluster ion source
• “Preploc” chamber in base system
• Multi-technique analytical versatility including AES, UPS and IPES
• Optional additional X-ray sources, including higher energy X-rays (HAXPS)
• Many sample preparation options
• Automated, unattended analysis
• Multiple sample analysis

X-ray Monochromator

• Twin-crystal, micro-focusing monochromator has a 500mm Rowland circle and uses an Al anode
• Sample X-ray spot size is selectable over a range of 200 to 900μm

Lens, Analyzer and Detector

• Lens/analyzer/detector combination makes the ESCALAB QXi ideal for both imaging and small area XPS
• Two types of detectors ensures optimum detection for each type of analysis — two-dimensional detector for imaging and a detector based on channel electron multipliers for spectroscopy when high count rates are to be detected
• Lens is equipped with two, computer-controlled iris mechanisms — one allows the user to control the field of view of the lens down to <20μm for small area analysis and the other to control the angular acceptance of the lens, which is essential for high-quality angle resolved XPS
• 180° hemispherical energy analyzer

Depth Profiling

• Digitally-controlled EX06 ion gun is a high-performance ion source even when using low energy ions
• Azimuthal sample rotation is available
• Optional MAGCIS monatomic & gas cluster ion source forcleaning and depth profiling of sensitive materials

Technique Options

• Multi-technique capability
• Other analytical techniques accommodated without compromise to the XPS performance
• Reverse power supplies for the lenses and analyzer using the EX06 or MAGCIS ion sources (ion scattering spectroscopy (ISS) is always available)
• Electron gun can be operated at up to 1000V and provides an excellent source for REELS
• Optional AES (Auger electron spectroscopy)
• Optional UPS (ultra-violet photoelectron spectroscopy)
• Optional IPES (inverse photoemission spectroscopy)

Vacuum System

• 5 mm thick mu-metal analysis chamber maximizes efficiency of magnetic shielding
• Increased effectiveness compared to shielding methods that use internal or external shields

Sample Preparation

• Combined entry lock and preparation chamber form part of the base system
• Option for full automated sample parking and sample exchange
• Additional preparation chambers are available

Avantage Data System

• Integrates all aspects of the analysis, including instrument control, data acquisition, data processing and reporting
• Allows remote control via desktop sharing software
• Manages total analysis process from sample to report