IM4000 II/IM4000 II-CTC
Standard Ar+ cross-section and surface polisher
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IM4000 II is a modular computer-controlled argon ion polishing system that can be equipped as a pure surface polisher, as a cross-section polisher or as a hybrid system, depending on the desired functionality. With a beam energy selectable in 100eV steps from 0.1keV to 6.0keV, a wide range of applications can be covered, from the finest polishes to larger cross-sections. In cross-section operation, IM4000 II achieves a maximum removal rate in Si of 500µm/hour (6keV, protrusion over the mask edge 100µm, stage oscillation ±30°). Functions such as auto-start/time preselection, interval polishing or two-stage processes are available. The IM4000 II-CTC offers the option of process temperatures down to -100°C in cross-section operation.
Product features:
- Single, robust and maintenance-friendly Penning-type ion gun with independent control of beam current and acceleration voltage. Allows intensive ion beams at all acceleration voltages (0-6kV)
- Cross-sectional process depth in Si with 100µm protrusion above mask, stage oscillation +/-30°, is 500µm per hour or more
- Surface polishing can be carried out at tilt angles from 0° to 90°, angle can be changed during the process
- Large sample chamber with a fully retractable multi-axis stage attached to the chamber door to accommodate the various application modules
