NX9000

In this unique system, the Ga-FIB and FE-SEM columns are at right angles to each other. This configuration is ideal for applications where large volumes (biological tissue, materials with large grain structures, semiconductor components, etc.) are to be analysed in 3D without distortion and with the highest resolution, even with very wide fields of view. 3D EBSD analysis can also be carried out with a completely stationary sample, i.e. without sample movement between FIB cutting and EBSD layer analysis.