SU8600
High-Resolution FE-SEM with Cold Field Emitter
The SU8600 is the successor to the proven Regulus field emission SEM family and fulfills the highest requirements for imaging-oriented applications. The cold field emitter with its near monochromatic emission, combined with a magnetic immersion lens, eliminates the need for beam boosting. So it provides superior resolution even at low beam energies, together with accurate stable signal separation by beam angle and energy. The SU8600 CFE-SEM also delivers top performance in analytical work using specific detectors. For example, you can add windowless EDX detectors for optimum light element analysis. These can be used with the SU8600 in the entire beam energy range up to 30keV, and at the shortest working distances from 4 mm due to the magnetic immersion lens. Or you could combine the SEM with the Bruker FlatQuad EDX detector with over 1sr solid angle for maximum signal efficiency. Sample currents up to 20nA are available.
Product features:
- Very durable, almost monochromatic Hitachi field emitter combined with magnetic immersion lens
- Extensive, flexibly configurable detector system with fine energy filtering, together with the live 6-channel image display enables comprehensive sample assessment
- Harmonises well with windowless EDX detectors
- Reliable, automated functions mean an easy-to-use and high performing SEM. These functions include the adjustment of user defined observation conditions, excellent 2D Auto-Focus and Auto- Stigmator, etc.
- The specimen exchange chamber allows for fast, clean loading of samples up to 150mm in diameter. The 5-axis eucentric specimen stage has X,Y travel ranges of 110mm x 110mm