The MultiGas ™ 2030 is an FTIR based analyzer capable of ppb to ppm sensitivity for multiple gas species in a variety of applications, such as stack emissions monitoring, process monitoring, ambient air monitoring, purity monitoring, and selective catalytic reduction performance monitoring. It can perform analysis in gas streams that contain up to 40% water, and can simultaneously analyze and display more than 30 gases. With…
Real-Time Trace Impurity Detection The MultiGas™ Purity Analyzer is an FTIR based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3, NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated…
Mass Flow Controllers & Mass Flow Meters - Mass Flow Controller Products from MKS Instruments Enabling our customers to bring their products and processes to market faster, more reliably, and more cost effectively is at the heart of our mass flow controller (MFC) design philosophy. The MKS family of mass flow controller and mass flow meter instruments measure and control the flow of critical gases in a wide variety of applicat…
The Type 146 Cluster Gauge is a versatile half-rack vacuum gauge measurement and control system which powers and provides simultaneous readout for up to four different vacuum gauges or mass flow controllers. Vacuum gauges supported are: Baratron® capacitance manometers (four, five, and six decades of measurement), Pirani, convection, and hot/cold cathode gauges. Two dual-channel features are provided to automatically switch fr…
