MultiGas™ 2032 Purity FTIR Gas Analyzer
Real-Time Trace Impurity Detection The MultiGas™ Purity Analyzer is an FTIR based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3, NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated…
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portable Gas analyzer
High quality results, high accuracy, very good even in extreme weather.
Review Date: 21 Sept 2015 | MKS Instruments Inc.
Real-Time Trace Impurity Detection
The MultiGas™ Purity Analyzer is an FTIR based gas analyzer capable of ppb contaminant detection in high purity bulk process gases such as NH3, NF3, SiF4, and H2. The MultiGas™ Purity Analyzer is composed of a process FTIR Spectrometer, high-optical-throughput internally polished sampling cell, and applications-specific gas analysis software. These integrated components, along with automated bake-out functionality, provide unmatched precision and accuracy for bulk gas contaminant monitoring.
Features & Benefits of the MultiGas™ Purity Analyzer:
• Real-time, on-line purity analysis of bulk process gas,
• Trace ppb level impurity detection in bulk process gases such as NH3, NF3, SiF4, and H2,
• Gas cell constructed to handle high purity corrosive gases,
• Specialized automatic zeroing and self-calibration software.
Applications:
Continuous monitoring of trace contaminants in high purity bulk gases in production environments.
