Rigaku's WaferX 310 represents the culmination of 35 years of experience in the X-ray fluorescence analysis of thin films on silicon wafers. The WaferX 310 is ideal for measuring BPSG, PSG and metal films. In addition, thin film BPSG, multilayered circuit film, WSix, electrode films, ferrodielectric thin films, FRAM, next generation DRAM, and SiOF are standard applications for this tool.Highly accurate analyses for the ultral…
The Rigaku MFM310 performs high-precision measurements not possible by optical or ultrasonic techniques. Perform thickness, density, roughness & composition of films on blanket and patterned wafers. This sophisticated X-ray metrology tool makes it practical to perform high-throughput measurements on product and blanket wafers ranging from ultrathin single-layer films to multilayer stacks.The MFM310 is designed with high-volum…
Rigaku's unique AZX 400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and/or heavy samples. Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg weight, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.Having the versatility to adapt to your specific…
Rigaku nano3DX is a true X-ray microscope (XRM) with the ability to measure relatively large samples at high resolution. This is accomplished by using a high powered rotating anode X-ray source and a high-resolution CCD imager. The rotating anode provides for fast data acquisition and the ability to switch anode materials easily to optimize the data acquisition. AVAILABILITY: Japan, Austraila/NZ and North AmericaThe new nano3…
Rigaku’s HyPix-3000 is a next-generation two-dimensional semiconductor detector designed specifically to meet the needs of the home lab diffractionist. One of the HyPix-3000’s unique features is its large active area of approximately 3000 mm² with a small pixel size of 100 μm², resulting in a detector with high spatial resolution. In addition, the HyPix-3000 is a single photon counting X-ray detector with a high count rate of…
High performance benchtop EDXRF spectrometer with Windows® software.
High performance WDXRF for rapid quantitative elemental analysis
Rigaku NEX DE VS High-performance, Direct Excitation Variable Spot EDXRF Elemental Analyzer
Elemental analysis by XRF of large objects with micro-mapping
Single crystal diffraction system with microfocus rotating anode generator
Single or dual microfocus X-ray diffractometer for all your crystallography needs
Versatile dual wavelength X-ray diffractometer with HPC X-ray detector
Customized single crystal diffraction system with microfocus rotating anode generator
Multipurpose X-ray diffraction system with built-in intelligent guidance
The XtaLAB Synergy-ED is a world first 3DED/microED (3D Electron Diffraction/micro Electron Diffraction) system and the successful culmination of a joint development project between Rigaku and JEOL. 3DED/microED allows crystallographers to probe the structure of crystals and nanocrystals as small as tens of nanometers, opening up many new possibilities. This new capability allows you to go beyond the limitations of X-ray diff…
Rigaku’s Radioflex EGM2 series directional radiographic testing systems are tried and tested. They are characterized by their reliability and robustness. Their rugged design caters to the rigors of in-field testing, while their proven dependability ensures they are ready to go when you are. These systems are built to last, while the high-performance ceramic X-ray tubes will provide years of operation.
