3D Nanoprototyping with a DualBeam

Devices and structures made on a nanoscale now have a number of real world applications, and the potential for further development and uptake is still growing. However, converting the latest ideas and designs into something real for research, testing and prototyping can pose a significant technical and financial barrier. This application note demonstrates the use of finely focused particle beams along with state-of-the-art patterning engines and precision stages integrated into FEI’s latest focused ion beam (FIB), scanning electron microscopes (SEM) and DualBeams™ (combined FIB and SEM) to rapidly design, create and inspect micro- and nano-scale functional prototype devices