Achieving nano-scaled EDS analysis in an SEM

In this application note, ZEISS discusses how to achieve nano-scaled resolution for energy dispersive spectroscopy (EDS) analysis using a thin specimen in scanning transmission electron microscopy (STEM). The note covers the practical challenges of low energy EDS, including low count rates, low yield, and complicated shapes of low energy X-ray emission lines. By reducing the interaction volume, STEM-EDS can achieve nanometer-scaled resolution.