Analysis of metallic impurities in specialty semiconductor gases using gas exchange device (GED)-ICP-MS

In this application note, the GED_LAB was integrated with the Agilent 8900 Triple Quadrupole ICP-MS (ICP-QQQ) for the analysis of HF and Cl₂ gases. Using the Agilent Software Developer’s Kit for ICP-MS MassHunter, IAS developed software to fully control the GED-MSAG-ICP-MS workflow from the GED software.