Benefits of Low Voltage Back Scatter Imaging on ZEISS GeminiSEM Family

Traditionally, back scattered electron (BSE) imaging in scanning electron microscopes (SEM) is performed at relatively high beam energy (usually higher than 5 kV). On ZEISS GeminiSEM 300 / 500, low voltage BSEs can be effectively imaged by various methods with a landing energy down to 500 V. The two BSE imaging modes presented here enable the user to derive a wide range of information on material contrast or topography keeping resolution and contrast high at the same time.