Imaging Magnetic Materials with Helios NanoLab, Nova NanoSEM and Verios

In recent years, the race for the highest resolution in scanning electron microscopy (SEM) has been driven by nanotechnology developments, new materials and smaller devices. This application note presents recent developments that have shown that sub-nanometer resolution can be achieved when combining the monochromated electron source of the Helios NanoLab™ and Verios™ with a magnetic immersion lens system. This improvement enables similar resolution from 1 to 30 keV, meaning that operators only need to consider the information depth required, rather than limitations in resolution.