Measuring Diamond-like Carbon Films by Dispersive Raman Spectroscopy

Raman spectroscopy is a powerful technique for monitoring the physical properties of diamond-like carbon (DLC) films. In this application note, Raman spectroscopy exhibited the ability to monitor DLC films that resulted from varying the plasma conditions. It is known that deposition conditions have a strong influence on the atomic structure of the resulting films. This work suggested that harder, more inert films result from higher plasma current and higher partial gas pressures.