Nanometer Scale EDS Analysis using Low-kVFE-SEM and Windowless EDS Detector

Characterizing structures on a nano-scale is challenging as the resolution of EDS analysis is usually limited to micrometers. This application note describes a method which combines scanning electron microscopy (SEM) with energy dispersive X-ray spectroscopy (EDS). The study used a combination of the X-Max Extreme – a high resolution, low kV SEM and a windowless EDS detector – and the ZEISS GeminiSEM 500 and was able to achieve a resolution of 10nm and less, allowing investigation of the morphology and chemistry of nano-structures.