ZEISS Crossbeam - Enabling Smart FIB Work with SmartSEM

This application note describes SmartFIB, a new user interface for FIB operation in ZEISS Crossbeam instruments, and some of its capabilities. SmartFIB is an extension of SmartSEM, the operating software of ZEISS scanning electron microscopes, which is active for ZEISS FIB-SEM systems. When milling an object by focused ion beam (FIB) it is essential to control a large set of patterning parameters. These define the so-called FIB milling strategy. Minor changes in the milling strategy can have a dramatic impact on the results achieved. SmartFIB allows the user to flexibly tailor his FIB milling strategy to obtain the desired results by providing access to all relevant parameters like dose, pixel spacing, pixel dwell time and FIB current.