ZEISS Focused Ion Beam Column - Enabling Precision and Long-term Stability for Cutting Edge Crossbeam Applications

A focused ion beam (FIB) combined with a field emission scanning electron microscope (FE-SEM) has become a powerful instrument for numerous applications in research and industry. Ion beam milling has become the standard for cross-sectioning and cutting slices for tomographic imaging, but can also be used to create new materials or functional structures with superior properties. In this paper, typical FIB-SEM applications and their demands in terms of FIB capability are introduced.