Dektak® 8 Advanced Development Profiler
The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements.
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this is a very flexible instrument, but we find there are some software constraints.
Review Date: 21 Jul 2008 | VEECO Instruments Inc.
The Dektak® 8 Advanced Development Profiler combines high repeatability, low-force sensor technology, and advanced 3D data analysis for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability and a vertical range of up to 1mm. Its overhead gantry design enables scan lengths to 200mm, for planarity and flatness measurements.
