Products & ReviewMaterials
FS-1 Multi-Wavelength Ellipsometer
Key Features Benefits Multiple LED sources: Blue (465nm), Green (525nm), Yellow (580nm), and Red (635nm) Long lifetimes (>50,000 hours), with no costly lamp changes, time consuming alignments or PM procedures No moving parts in the ellipsometric detector Fast measurement times (multi-wav…
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Great for ALD in situ analysis.
Application Area:
in situ film analysis
Works really well for ALD in situ analysis. Highly precise results. Good software.
Review Date: 12 Mar 2020 | Film Sense
Key Features
Benefits
- Multiple LED sources: Blue (465nm), Green (525nm), Yellow (580nm), and Red (635nm)
- Long lifetimes (>50,000 hours), with no costly lamp changes, time consuming alignments or PM procedures
- No moving parts in the ellipsometric detector
- Fast measurement times (multi-wavelength data in 10 ms) and long term reliability
- Excellent thickness precision, better than 0.001 nm for many samples (for a 1 second acquisition), even for sub-monolayer film thicknesses
- Measurement precision that is only possible with an ellipsometer
- Integrated computer for instrument control and data analysis, with a web browser interface accessible from any modern computer, laptop, or tablet
- No complicated software setup and maintenance
- Affordability
- The power of Multi-Wavelength Ellipsometry, at the price point of single wavelength ellipsometer and spectroscopic reflectometer systems
