LEG 62 - Small Spot Static/Scanning Electron Gun
The LEG62 is a medium to high resolution 5kV electron source designed for pulse-counting Auger electron spectroscopy (AES). It features four scanning poles enabling both variable position, static AES and scanning Auger maps (SAM). Product detail:Small spot static and scanning electron source for Auger analysis The LEG62 is designed for pulse-counting AES. It features four scanning poles enabling both variable position, static…
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The LEG62 is a medium to high resolution 5kV electron source designed for pulse-counting Auger electron spectroscopy (AES). It features four scanning poles enabling both variable position, static AES and scanning Auger maps (SAM).
Product detail:
Small spot static and scanning electron source for Auger analysis
The LEG62 is designed for pulse-counting AES. It features four scanning poles enabling both variable position, static AES and scanning Auger maps (SAM). The current arriving at the sample is both stable and user controlled.
The gun consists of an electron source, optical column, and scanning poles mounted inside a m-metal tube. The m-metal shielding helps to minimise the effects of external magnetic fields affecting the electron beam. This is particularly important for stainless steel chambers.
Electron source
The electron source is a Thoria coated Rhenium tape filament with the emission feedback controlled by a variable potential grid in front of the filament. The user can set the beam current (emission) which is controlled by a grid potential feedback loop to give a constant value. The beam current is the filament (cathode) current to earth. The filament and grid are in one assembly fixing their relative distances. This assembly can be demounted by the user and replaced if required after extended running or hostile environment.
Lenses
An electrostatic lens (extractor) is at a user variable positive potential in front of the filament-grid assembly creates a stable field accelerating the electrons through the rest of the optical column.
An electrostatic lens (condenser) controls the sample current and electron beam resolution. The user can vary its potential to suit the application.
An electrostatic lens (focus) focuses the beam onto the sample. The user can vary its potential to suit the application.
Four poles at the end of the gun allow the beam position to be controlled. A potential of opposite polarity on each pair of opposing poles deflect the beam in the X and Y directions. This can be done with a DC potential moving the spot around the sample or scanned (with an appropriate scan unit) at various speeds for AES or even up to TV rate for scanning electron microscopy SEM.
