Products & ReviewLife Sciences
Park NX-3DM
Park SystemsAvailable: Worldwide
Park 3DM Series is the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements.
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A fully automated industrial AFM using NX technology
- NX technology automatically constructs an extremely accurate topographical image and collects essential dimensional data
- The low noise Z-detector works on an independent, closed loop to minimize errors in topography
- True Non-contact™ mode allow for the collection of high resolution and accurate data without tip-sample damage
Innovative head design for undercut and overhang structures
- Patented decoupled XY and Z scanning systems work together with the tilted Z-scanner, letting users overcome normal challenges in accurate sidewall analysis associated with normal and flare tip methods
- Z-head tilting mechanism allows access to the sidewalls using an ultra-sharp tip to obtain the same high resolution and definition as is obtained over the rest of the material
A Reliable, Seamless Measurement Tool for 3D materials
- No sample preparation is required to obtain the sidewall roughness or critical dimension measurements in this process
- By utilizing Z-head tilting and True Non-contact™ mode, the NX-3DM allows for both tip-preserving and high-resolution collection of sidewall data
