Park NX20 300mm
The leading automated nanometrology tool for 300 mm wafer measurement and analysis
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The Park NX20 300mm is the industry's first large sample AFM that supports a full motorized traveling range of 300 mm x 300 mm. Designed for failure analysis and quality control laboratories, the new upgraded Park NX20 system can inspect an entire 300 mm wafer efficiently, without any need for cumbersome sample displacement. Despite the enlarged platform to support the 300 mm motorized XY stage, Park's innovative vibration isolation technology keeps the system noise level below 0.5 angstrom (Å) RMS or typically 0.3 Å RMS in the field. Proven AFM performance and SingleClick-AFM automation eliminates any need for sample adjustment and makes of Park NX20 the scanning process as efficient and user-friendly as possible. With our "Program Mode" interface users can easily implement reliable and repeatable sequential multiple-site measurements over the entire 300mm x 300mm area. This makes the NX20 300 mm the premiere choice for FA, QA, and QC engineers that need to scan large samples.
Key Technical Features:
- Flexible 300 mm Sample Chuck
- Specifically Built for Large Sample Wafer Inspection
- Proven NX20 Performance with a 300 mm Sample Stage
- Scan Multiple Sites on the Entire 300 mm Wafer
